This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly measures humidity in % RH.
A novel synthesis and characterization of cellulose, hydroxyapatite and chemically-modified carbon electrode (Cellulose-HAp-CME) composite was reported for the analysis of trace Pb(II) ions detection and its validation in blood serum. The Field Emission Scanning Electron Microscopy (FESEM) analyses showed that the composite retained the orderly porous structure but with scattered particle size agglomeration. The Fourier Transform Infrared Spectroscopy (FTIR) spectra suggested the presence of functional groups associated with the bending and stretching of carbon bonds and intermolecular H-bonding. X-ray Diffraction (XRD) analyses further elucidated that the crystallite size could have influenced the properties of the electrode. Based on Thermo-gravimetric Analysis (TGA/DTG), the composites showed thermal stability with more than 60% residual content at 700°C. The sensor was successfully developed for trace Pb(II) ions detection in complex medium such as blood serum, in the physiologically relevant range of 10-60ppb, with resulting Limit of Detection (LOD) of 0.11±0.36ppb and Limit of Quantification (LOQ) of 0.36±0.36ppb. The newly fabricated electrode could be advantageous as a sensing platform with favourable electrochemical characteristics for robust, in situ and rapid environmental and clinical analyses of heavy metal ions.
Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor is designed, fabricated and optically characterized. The sensor is fabricated by using CMOS thin layers and dry post micromachining is used to release the device structure and finally the sensor chip is packaged in DIP. The sensor consists of a shuttle which is designed to resonate in the lateral direction (first mode of resonance). In the presence of an external magnetic field, the Lorentz force actuates the shuttle in the lateral direction and the amplitude of resonance is measured using an optical method. The differential change in the amplitude of the resonating shuttle shows the strength of the external magnetic field. The resonance frequency of the shuttle is determined to be 8164 Hz experimentally and from the resonance curve, the quality factor and damping ratio are obtained. In an open environment, the quality factor and damping ratio are found to be 51.34 and 0.00973 respectively. The sensitivity of the sensor is determined in static mode to be 0.034 µm/mT when a current of 10 mA passes through the shuttle, while it is found to be higher at resonance with a value of 1.35 µm/mT at 8 mA current. Finally, the resolution of the sensor is found to be 370.37 µT.
This work reports the use of a ternary composite that integrates p-Toluene sulfonic acid doped polyaniline (PANI), chitosan, and reduced graphene oxide (RGO) as the active sensing layer of a surface plasmon resonance (SPR) sensor. The SPR sensor is intended for application in the non-invasive monitoring and screening of diabetes through the detection of low concentrations of acetone vapour of less than or equal to 5 ppm, which falls within the range of breath acetone concentration in diabetic patients. The ternary composite film was spin-coated on a 50-nm-thick gold layer at 6000 rpm for 30 s. The structure, morphology and chemical composition of the ternary composite samples were characterized by FTIR, UV-VIS, FESEM, EDX, AFM, XPS, and TGA and the response to acetone vapour at different concentrations in the range of 0.5 ppm to 5 ppm was measured at room temperature using SPR technique. The ternary composite-based SPR sensor showed good sensitivity and linearity towards acetone vapour in the range considered. It was determined that the sensor could detect acetone vapour down to 0.88 ppb with a sensitivity of 0.69 degree/ppm with a linearity correlation coefficient of 0.997 in the average SPR angular shift as a function of the acetone vapour concentration in air. The selectivity, repeatability, reversibility, and stability of the sensor were also studied. The acetone response was 87%, 94%, and 99% higher compared to common interfering volatile organic compounds such as propanol, methanol, and ethanol, respectively. The attained lowest detection limit (LOD) of 0.88 ppb confirms the potential for the utilisation of the sensor in the non-invasive monitoring and screening of diabetes.
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
To non-invasively monitor and screen for diabetes in patients, there is need to detect low concentration of acetone vapor in the range from 1.8 ppm to 5 ppm, which is the concentration range of acetone vapor in diabetic patients. This work presents an investigation for the utilization of chitosan-polyethylene glycol (PEG)-based surface plasmon resonance (SPR) sensor in the detection of trace concentration acetone vapor in the range of breath acetone in diabetic subjects. The structure, morphology, and elemental composition of the chitosan-PEG sensing layer were characterized using FTIR, UV-VIS, FESEM, EDX, AFM, and XPS methods. Response testing was conducted using low concentration of acetone vapor in the range of 0.5 ppm to 5 ppm using SPR technique. All the measurements were conducted at room temperature and 50 mL/min gas flow rate. The sensor showed good sensitivity, linearity, repeatability, reversibility, stability, and high affinity toward acetone vapor. The sensor also showed better selectivity to acetone compared to methanol, ethanol, and propanol vapors. More importantly, the lowest detection limit (LOD) of about 0.96 ppb confirmed the applicability of the sensor for the non-invasive monitoring and screening of diabetes.
Corrosion prevention has been a global phenomenon, particularly in metallic and construction engineering. Most inhibitors are expensive and toxic. Therefore, developing nontoxic and cheap corrosion inhibitors has been a way forward. In this work, L-arginine was successfully grafted on chitosan by the thermal technique using a reflux condenser. This copolymer was characterized by Fourier-transform infrared spectroscopy (FTIR), thermogravimetric analysis (TGA), and X-ray diffraction (XRD). The corrosion inhibition performance of the composite polymer was tested on mild steel in 0.5M HCl by electrochemical methods. The potentiodynamic polarization (PDP) and electrochemical impedance spectroscopy (EIS) results were consistent. The inhibition efficiency at optimum concentration rose to 91.4%. The quantum chemical calculation parameters show good properties of the material as a corrosion inhibitor. The molecular structure of the inhibitor was subjected to density functional theory (DFT) to understand its theoretical properties, and the results confirmed the inhibition efficiency of the grafted polymer for corrosion prevention.
Graphene and its derivatives have emerged as peerless electrode materials for energy storage applications due to their exclusive electroactive properties such as high chemical stability, wettability, high electrical conductivity, and high specific surface area. However, electrodes from graphene-based composites are still facing some substantial challenges to meet current energy demands. Here, we applied one-pot facile solvothermal synthesis to produce nitrogen-doped reduced graphene oxide (N-rGO) nanoparticles using an organic solvent, ethylene glycol (EG), and introduced its application in supercapacitors. Electrochemical analysis was conducted to assess the performance using a multi-channel electrochemical workstation. The N-rGO-based electrode demonstrates the highest specific capacitance of 420 F g-1 at 1 A g-1 current density in 3 M KOH electrolyte with the value of energy (28.60 Whkg-1) and power (460 Wkg-1) densities. Furthermore, a high capacitance retention of 98.5% after 3000 charge/discharge cycles was recorded at 10 A g-1. This one-pot facile solvothermal synthetic process is expected to be an efficient technique to design electrodes rationally for next-generation supercapacitors.
The optical constants of Para-Toluene sulfonic acid-doped polyaniline (PANI), PANIchitosan composites, PANI-reduced graphene-oxide composites and a ternary composite comprising of PANI, chitosan and reduced graphene-oxide dispersed in diluted p-toluene sulfonic acid (PTSA) solution and N-Methyl-2-Pyrrolidone (NMP) solvent have been evaluated and compared. The optical constant values were extracted from the absorbance spectra of thin layers of the respective samples. The potential utilization of the materials as the active sensing materials of surface plasmon resonance biosensors has also been assessed in terms of the estimated value of the penetration depth through a dielectric medium. The results show a reasonable dependence of the optical constant parameters on the solvent type. Higher real part refractive index (n) and real part complex dielectric permittivity (ε') values were observed for the samples prepared using PTSA solution, while higher optical conductivity values were observed for the NMP-based samples due to their relatively higher imaginary part refractive index (k) and imaginary part complex dielectric permittivity (ε″) values. In addition, NMP-based samples show improvement in terms of the penetration depth through a dielectric medium by around 9.5, 1.6, 4.4 and 2.9 times compared to PTSA-based samples for the PANI, PANI-chitosan, PANI-RGO and the ternary composites, respectively. Based on these, it is concluded that preparation of these materials using different dispersion solvents could produce materials of different optical properties. Thus, the variation of the dispersion solvent will allow the flexible utilization of the PANI and the composites for diverse applications.