Displaying publications 21 - 21 of 21 in total

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  1. Sim KS, White JD
    J Microsc, 2005 Mar;217(Pt 3):235-40.
    PMID: 15725127
    The quality of an image generated by a scanning electron microscope is dependent on secondary emission, which is a strong function of surface condition. Thus, empirical formulae and available databases are unable to take into account actual metrology conditions. This paper introduces a simple and reliable measurement technique to measure secondary electron yield (delta) and backscattered electron yield (eta) that is suitable for in-situ measurements on a specimen immediately prior to imaging. The reliability of this technique is validated on a number of homogenous surfaces. The measured electron yields are shown to be within the range of published data and the calculated signal-to-noise ratio compares favourably with that estimated from the image.
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