Scanning, 2004 7 31;26(3):135-9.
PMID: 15283250

Abstract

In the last two decades, a variety of techniques for signal-to-noise ratio (SNR) estimation in scanning electron microscope (SEM) images have been proposed. However, these techniques can be divided into two groups: first, SNR estimators of good accuracy, but based on impractical assumptions; second, estimators based on realistic assumptions but of poor accuracy. In this paper we propose the implementation of autoregressive (AR)-model interpolation as a solution to the problem. Unlike others, the proposed technique is based on a single SEM image and offers the required accuracy and robustness in estimating SNR values.

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