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High Sensitivity pH Sensor Based on Porous Silicon (PSi) Extended Gate Field-Effect Transistor

Al-Hardan NH 1 , Abdul Hamid MA 2 , Ahmed NM 3 , Jalar A 4 , Shamsudin R 5 , Othman NK 6 Show all authors , Kar Keng L 7 , Chiu W 8 , Al-Rawi HN 9

Affiliations 

  • 1 School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. naif@ukm.edu.my
  • 2 School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. azmi@ukm.edu.my
  • 3 School of Physics, Universiti Sains Malaysia (USM), 11800 Penang, Pulau Pinang, Malaysia. naser@usm.my
  • 4 Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. azmn@ukm.edu.my
  • 5 School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. linda@ukm.edu.my
  • 6 School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. insan@ukm.edu.my
  • 7 School of Applied Physics, Faculty of Science and Technology, Universiti Kebangsaan Malaysia (UKM), 43600 Bangi, Selangor, Malaysia. karkeng.iamkklim@gmail.com
  • 8 Low Dimensional Materials Research Centre, Department of Physics, Faculty of Science, University of Malaya, 50603 Kuala Lumpur, Malaysia. w.s.chiu@um.edu.my
  • 9 School of Electrical and Electronic Engineering-Universiti Sains Malaysia (USM), 14300 Nibong Tebal, Pulau Pinang, Malaysia. comeon500@yahoo.com
Sensors (Basel), 2016 Jun 07;16(6).
PMID: 27338381 DOI: 10.3390/s16060839

Abstract

In this study, porous silicon (PSi) was prepared and tested as an extended gate field-effect transistor (EGFET) for pH sensing. The prepared PSi has pore sizes in the range of 500 to 750 nm with a depth of approximately 42 µm. The results of testing PSi for hydrogen ion sensing in different pH buffer solutions reveal that the PSi has a sensitivity value of 66 mV/pH that is considered a super Nernstian value. The sensor considers stability to be in the pH range of 2 to 12. The hysteresis values of the prepared PSi sensor were approximately 8.2 and 10.5 mV in the low and high pH loop, respectively. The result of this study reveals a promising application of PSi in the field for detecting hydrogen ions in different solutions.

* Title and MeSH Headings from MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine.

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