Sains Malaysiana, 2018;47:2565-2571.

Abstract

In this paper, Taguchi experimental design technique was applied for optimization of chromium (Cr)/silver (Ag)/indium
tin oxide (ITO) SPR sensor for operation in near infrared region. Four factors were considered which include wavelength,
thickness of Cr, thickness of Ag, and thickness of ITO. Finite-difference-time-domain (FDTD) method was used in numerical
analysis for minimum reflectance (Rmin) and full-width-at-half-maximum (FWHM) performance parameters. The results
obtained from the Taguchi method shows that the optimized parameter for Rmin was 785 nm of wavelength, Cr (1 nm),
Ag (40 nm) and ITO (20 nm), whereas the optimized parameter for FWHM was 785 of wavelength, Cr (0 nm), Ag (40 nm)
and ITO (0 nm). In short, the optimum parameters for achieving the desired performance of sensor were successfully
predicted using Taguchi optimization method.