Sol-gel barium titanate (BaTiO3) and erbium doped barium titanate (Er-BaTiO3) were deposited on SiO2/Si substrates. The phase and crystallinity of the thin films were identified using x-ray diffractometer (XRD). The effect of Er dopant into BaTiO3 thin film on its grain size and surface roughness was studied using atomic force microscope (AFM) in tapping mode. XRD patterns revealed that the films were crystallized with perovskite structure. At the same time, it was shown that introducing Er dopant into BaTiO3 thin film caused the dominant peak to shift towards higher angle. AFM micrographs indicated that the films had well distributed grains, dense and crack-free surface. In general, substitution of Er dopant into Ba-site reduced the grain sizes and roughness parameter of the BaTiO3 which was attributed to the smaller ionic radius of Er.