This paper discusses sputtered silicon encapsulation as a wafer level packaging approach for isolatable MEMS devices. Devices such as accelerometers, RF switches, inductors, and filters that do not require interaction with the surroundings to function, could thus be fully encapsulated at the wafer level after fabrication. A MEMSTech 50g capacitive accelerometer was used to demonstrate a sputtered encapsulation technique. Encapsulation with a very uniform surface profile was achieved using spin-on glass (SOG) as a sacrificial layer, SU-8 as base layer, RF sputtered silicon as main structural layer, eutectic gold-silicon as seal layer, and liquid crystal polymer (LCP) as outer encapsulant layer. SEM inspection and capacitance test indicated that the movable elements were released after encapsulation. Nanoindentation test confirmed that the encapsulated device is sufficiently robust to withstand a transfer molding process. Thus, an encapsulation technique that is robust, CMOS compatible, and economical has been successfully developed for packaging isolatable MEMS devices at the wafer level.
We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable properties for semiconductor applications. Microgap electrodes have important applications in power saving devices, electrochemical sensors and dielectric detections of biomolecules. Physical characterization by scanning electron microscopy (SEM) demonstrated such microgap electrodes could be produced with high reproducibility and precision. Preliminary electrical
characterizations showed such structures are able to maintain a good capacitance parameters and constant current supply over a wide ranging differences in voltages. They have also good efficiency of power consumption with high insulation properties.
This work reports synthesis, thin film characterizations, and study of an organic semiconductor 2-aminoanthraquinone (AAq) for humidity and temperature sensing applications. The morphological and phase studies of AAq thin films are carried out by scanning electron microscope (SEM), atomic force microscope (AFM), and X-ray diffraction (XRD) analysis. To study the sensing properties of AAq, a surface type Au/AAq/Au sensor is fabricated by thermally depositing a 60 nm layer of AAq at a pressure of ~10-5 mbar on a pre-patterned gold (Au) electrodes with inter-electrode gap of 45 µm. To measure sensing capability of the Au/AAq/Au device, the variations in its capacitance and resistance are studied as a function of humidity and temperature. The Au/AAq/Au device measures and exhibits a linear change in capacitance and resistance when relative humidity (%RH) and temperature are varied. The AAq is a hydrophobic material which makes it one of the best candidates to be used as an active material in humidity sensors; on the other hand, its high melting point (575 K) is another appealing property that enables it for its potential applications in temperature sensors.
Two different ionic liquid-based biopolymer electrolyte systems were prepared using a solution casting technique. Corn starch and lithium hexafluorophosphate (LiPF₆) were employed as polymer and salt, respectively. Additionally, two different counteranions of ionic liquids, viz. 1-butyl-3-methylimidazolium hexafluorophosphate (BmImPF₆) and 1-butyl-3-methylimidazolium trifluoromethanesulfonate (also known as 1-butyl-3-methylimidazolium triflate) (BmImTf) were used and studied in this present work. The maximum ionic conductivities of (1.47 ± 0.02) × 10(-4) and (3.21 ± 0.01) × 10(-4) S∙cm(-1) were achieved with adulteration of 50 wt% of BmImPF₆ and 80 wt% of BmImTf, respectively at ambient temperature. Activated carbon-based electrodes were prepared and used in supercapacitor fabrication. Supercapacitors were then assembled using the most conducting polymer electrolyte from each system. The electrochemical properties of the supercapacitors were then analyzed. The supercapacitor containing the triflate-based biopolymer electrolyte depicted a higher specific capacitance with a wider electrochemical stability window compared to that of the hexafluorophosphate system.
Electrical energy can be harvested from the living plants as a new potential renewable energy source. Characterization of the electrical signal is needed to enable an optimum energy harvesting setup condition. In the present paper, an investigation is conducted to analyze the characteristic of Aloe Barbadensis Miller (Aloe Vera) leaves in terms of electrical energy generation under specific experimental setups. The experimental results show that 1111.55uW electrical power can be harvested from the Aloe Vera with 24 pairs of electrodes and this energy is capable to be stored in a capacitor. This energy has a high potential to be used to power up a low power consumption device.
Electrical characteristics of living cells have been proven to reveal important details about their internal structure, charge distribution and composition changes in the cell membrane, as well as the extracellular context. An impedance flow cytometry is a common approach to determine the electrical properties of a cell, having the advantage of label-free and high throughput. However, the current techniques are complex and costly for the fabrication process. For that reason, we introduce an integrated dual microneedle-microchannel for single-cell detection and electrical properties extraction. The dual microneedles utilized a commercially available tungsten needle coated with parylene. When a single cell flows through the parallel-facing electrode configuration of the dual microneedle, the electrical impedance at multiple frequencies is measured. The impedance measurement demonstrated the differential of normal red blood cells (RBCs) with three different sizes of microbeads at low and high frequencies, 100 kHz and 2 MHz, respectively. An electrical equivalent circuit model (ECM) was used to determine the unique membrane capacitance of individual cells. The proposed technique demonstrated that the specific membrane capacitance of an RBC is 9.42 mF/m-2, with the regression coefficients, ρ at 0.9895. As a result, this device may potentially be used in developing countries for low-cost single-cell screening and detection.
Capillary electrophoresis coupled with a capacitively coupled contactless conductivity detector (CE-C(4)D) has been employed for the determination of the β-blocker drugs (atenolol and amiloride) in pharmaceutical formulations. 150 mM acetic acid was used as background electrolyte. The influence of several factors (detector excitation voltage and frequency, buffer concentration, applied voltage, capillary temperature, and injection time) was studied. Non-UV absorbing L-valine was used as an internal standard; the analytes were all separated in less than 7 min. The separation was carried out in normal polarity mode at 28 °C, 25 kV, and using hydrodynamic injection (25 s). The separation was effected in a bare fused-silica capillary 75 μm × 52 cm. The CE-C(4)D method was validated with respect to linearity, limit of detection and quantification, accuracy, precision, and selectivity. Calibration curves were linear over the range 5-250 μg mL(-1) for the studied analytes. The relative standard deviations of intra- and inter-day precisions of migration times and corrected peak areas were less than 6.0%. The method showed good precision and accuracy and was successfully applied to the simultaneous determination of the β-blocker drugs in different pharmaceutical tablets.
Nanostructured network-like MnO2-NiO composite electrodes were electrodeposited onto stainless steel substrates via different electrodeposition modes, such as chronopotentiometry, chronoamperometry, and cyclic voltammetry, and then subjected to heat treatment at 300°C for metal oxide conversion. X-ray diffraction, field emission scanning electron microscopy, and transmission electron microscopy were used to study the crystalline natures and morphologies of the deposited films. The electrochemical properties were investigated using cyclic voltammetry and charge/discharge tests. The results revealed that the electrochemical performance of the as-obtained composite electrodes depended on the electrodeposition mode. The electrochemical properties of MnO2-NiO composite electrodes prepared using cyclic voltammetry exhibited the highest capacitance values and were most influenced by the deposition cycle number. The optimum specific capacitance was 3509 Fg-1 with energy and power densities of 1322 Wh kg-1 and 110.5 kW kg-1, respectively, at a current density of 20 Ag-1 in a mixed KOH/K3Fe(CN)6 electrolyte.
Plasticized magnesium ion conducting polymer blend electrolytes based on chitosan (CS): polyvinyl alcohol (PVA) was synthesized with a casting technique. The source of ions is magnesium triflate Mg(CF3SO3)2, and glycerol was used as a plasticizer. The electrical and electrochemical characteristics were examined. The outcome from X-ray diffraction (XRD) examination illustrates that the electrolyte with highest conductivity exhibits the minimum degree of crystallinity. The study of the dielectric relaxation has shown that the peak appearance obeys the non-Debye type of relaxation process. An enhancement in conductivity of ions of the electrolyte system was achieved by insertion of glycerol. The total conductivity is essentially ascribed to ions instead of electrons. The maximum DC ionic conductivity was measured to be 1.016 × 10-5 S cm-1 when 42 wt.% of plasticizer was added. Potential stability of the highest conducting electrolyte was found to be 2.4 V. The cyclic voltammetry (CV) response shows the behavior of the capacitor is non-Faradaic where no redox peaks appear. The shape of the CV response and EDLC specific capacitance are influenced by the scan rate. The specific capacitance values were 7.41 F/g and 32.69 F/g at 100 mV/s and 10 mV/s, respectively. Finally, the electrolyte with maximum conductivity value is obtained and used as electrodes separator in the electrochemical double-layer capacitor (EDLC) applications. The role of lattice energy of magnesium salts in energy storage performance is discussed in detail.
This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbone shaped electrostatic comb drive actuator and compared against the performance of a straight sided electrostatic comb drive actuator. Performances of both designs are evaluated by comparison of displacement and electrostatic force. For both cases, the active area and the minimum gap distance between the two electrodes were constant. An active area of 800 × 300 μm, which contained 16 fingers of fishbone shaped actuators and 40 fingers of straight sided actuators, respectively, was used. Through simulation, improvement of drive force of the fishbone shaped electrostatic comb driver is approximately 485% higher than conventional electrostatic comb driver. These results indicate that the fishbone actuator design provides good potential for applications as high force density electrostatic microactuator in MEMS systems.
This research paper investigates the electrochemical performance of chitosan (CS): dextran (DX) polymer-blend electrolytes (PBEs), which have been developed successfully with the incorporation of ammonium hexafluorophosphate (NH4PF6). X-ray diffraction (XRD) analysis indicates that the plasticized electrolyte system with the highest value of direct current (DC) ionic conductivity is the most amorphous system. The glycerol addition increased the amorphous phase and improved the ionic dissociation, which contributed to the enhancement of the fabricated device's performance. Transference number analysis (TNM) has shown that the charge transport process is mainly by ions rather than electrons, as tion = 0.957. The CS:DX:NH4PF6 system was found to decompose as the voltage goes beyond 1.5 V. Linear sweep voltammetry (LSV) revealed that the potential window for the most plasticized system is 1.5 V. The fabricated electrochemical double-layer capacitor (EDLC) was analyzed with cyclic voltammetry (CV) and charge-discharge analysis. The results from CV verify that the EDLC in this work holds the characteristics of a capacitor. The imperative parameters of the fabricated EDLC such as specific capacitance and internal resistance were found to be 102.9 F/g and 30 Ω, respectively. The energy stored and power delivered by the EDLC were 11.6 Wh/kg and 2741.2 W/kg, respectively.
In this work, plasticized magnesium ion-conducting polymer blend electrolytes based on chitosan:methylcellulose (CS:MC) were prepared using a solution cast technique. Magnesium acetate [Mg(CH3COO)2] was used as a source of the ions. Nickel metal-complex [Ni(II)-complex)] was employed to expand the amorphous phase. For the ions dissociation enhancement, glycerol plasticizer was also engaged. Incorporating 42 wt% of the glycerol into the electrolyte system has been shown to improve the conductivity to 1.02 × 10-4 S cm-1. X-ray diffraction (XRD) analysis showed that the electrolyte with the highest conductivity has a minimum crystallinity degree. The ionic transference number was estimated to be more than the electronic transference number. It is concluded that in CS:MC:Mg(CH3COO)2:Ni(II)-complex:glycerol, ions are the primary charge carriers. Results from linear sweep voltammetry (LSV) showed electrochemical stability to be 2.48 V. An electric double-layer capacitor (EDLC) based on activated carbon electrode and a prepared solid polymer electrolyte was constructed. The EDLC cell was then analyzed by cyclic voltammetry (CV) and galvanostatic charge-discharge methods. The CV test disclosed rectangular shapes with slight distortion, and there was no appearance of any redox currents on both anodic and cathodic parts, signifying a typical behavior of EDLC. The EDLC cell indicated a good cyclability of about (95%) for throughout of 200 cycles with a specific capacitance of 47.4 F/g.
In this work, plasticized polymer electrolyte films consisting of chitosan, ammonium nitrate (NH4NO3) and glycerol for utilization in energy storage devices was presented. Various microscopic, spectroscopic and electrochemical techniques were used to characterize the concerned electrolyte and the electrical double-layer capacitor (EDLC) assembly. The nature of complexation between the polymer electrolyte components was examined via X-ray diffraction analysis. In the morphological study, field emission scanning electron microscopy (FESEM) was used to investigate the impact of glycerol as a plasticizer on the morphology of films. The polymer electrolyte (conducting membrane) was found to have a conductivity of 3.21 × 10-3 S/cm. It is indicated that the number density (n), mobility (μ) and diffusion coefficient (D) of ions are increased with the glycerol amount. The mechanism of charge storing was clarified, which implies a non-Faradaic process. The voltage window of the polymer electrolyte is 2.32 V. It was proved that the ion is responsible for charge-carrying via measuring the transference number (TNM). It was also determined that the internal resistance of the EDLC assembly lay between 39 and 50 Ω. The parameters associated with the EDLC assembly are of great importance and the specific capacitance (Cspe) was determined to be almost constant over 1 to 1000 cycles with an average of 124 F/g. Other decisive parameters were found: energy density (18 Wh/kg) and power density (2700 W/kg).
Nanocomposite polymer electrolyte membranes (NCPEMs) based on poly(acrylic acid)(PAA) and titania (TiO₂) are prepared by a solution casting technique. The ionic conductivity of NCPEMs increases with the weight ratio of TiO₂.The highest ionic conductivity of (8.36 ± 0.01) × 10-4 S·cm-1 is obtained with addition of 6 wt % of TiO₂ at ambient temperature. The complexation between PAA, LiTFSI and TiO₂ is discussed in Attenuated total reflectance-Fourier Transform Infrared (ATR-FTIR) studies. Electrical double layer capacitors (EDLCs) are fabricated using the filler-free polymer electrolyte or the most conducting NCPEM and carbon-based electrodes. The electrochemical performances of fabricated EDLCs are studied through cyclic voltammetry (CV) and galvanostatic charge-discharge studies. EDLC comprising NCPEM shows the specific capacitance of 28.56 F·g-1 (or equivalent to 29.54 mF·cm-2) with excellent electrochemical stability.
This report shows a simple solution cast methodology to prepare plasticized polyvinyl alcohol (PVA)/methylcellulose (MC)-ammonium iodide (NH4I) electrolyte at room temperature. The maximum conducting membrane has a conductivity of 3.21 × 10-3 S/cm. It is shown that the number density, mobility and diffusion coefficient of ions are enhanced by increasing the glycerol. A number of electric and electrochemical properties of the electrolyte-impedance, dielectric properties, transference numbers, potential window, energy density, specific capacitance (Cs) and power density-were determined. From the determined electric and electrochemical properties, it is shown that PVA: MC-NH4I proton conducting polymer electrolyte (PE) is adequate for utilization in energy storage device (ESD). The decrease of charge transfer resistance with increasing plasticizer was observed from Bode plot. The analysis of dielectric properties has indicated that the plasticizer is a novel approach to increase the number of charge carriers. The electron and ion transference numbers were found. From the linear sweep voltammetry (LSV) response, the breakdown voltage of the electrolyte is determined. From Galvanostatic charge-discharge (GCD) measurement, the calculated Cs values are found to drop with increasing the number of cycles. The increment of internal resistance is shown by equivalent series resistance (ESR) plot. The energy and power density were studied over 250 cycles that results to the value of 5.38-3.59 Wh/kg and 757.58-347.22 W/kg, respectively.
Chitosan (CS)-dextran (DN) biopolymer electrolytes doped with ammonium iodide (NH4I) and plasticized with glycerol (GL), then dispersed with Zn(II)-metal complex were fabricated for energy device application. The CS:DN:NH4I:Zn(II)-complex was plasticized with various amounts of GL and the impact of used metal complex and GL on the properties of the formed electrolyte were investigated.The electrochemical impedance spectroscopy (EIS) measurements have shown that the highest conductivity for the plasticized system was 3.44 × 10-4 S/cm. From the x-ray diffraction (XRD) measurements, the plasticized electrolyte with minimum degree of crystallinity has shown the maximum conductivity. The effect of (GL) plasticizer on the film morphology was studied using FESEM. It has been confirmed via transference number analysis (TNM) that the transport mechanism in the prepared electrolyte is predominantly ionic in nature with a high transference number of ion (ti)of 0.983. From a linear sweep voltammetry (LSV) study, the electrolyte was found to be electrochemically constant as the voltage sweeps linearly up to 1.25 V. The cyclic voltammetry (CV) curve covered most of the area of the current-potential plot with no redox peaks and the sweep rate was found to be affecting the capacitance. The electric double-layer capacitor (EDLC) has shown a great performance of specific capacitance (108.3 F/g), ESR(47.8 ohm), energy density (12.2 W/kg) and power density (1743.4 W/kg) for complete 100 cycles at a current density of 0.5 mA cm-2.
In this work, a pair of biopolymer materials has been used to prepare high ion-conducting electrolytes for energy storage application (ESA). The chitosan:methylcellulose (CS:MC) blend was selected as a host for the ammonium thiocyanate NH4SCN dopant salt. Three different concentrations of glycerol was successfully incorporated as a plasticizer into the CS-MC-NH4SCN electrolyte system. The structural, electrical, and ion transport properties were investigated. The highest conductivity of 2.29 × 10-4 S cm-1 is recorded for the electrolyte incorporated 42 wt.% of plasticizer. The complexation and interaction of polymer electrolyte components are studied using the FTIR spectra. The deconvolution (DVN) of FTIR peaks as a sensitive method was used to calculate ion transport parameters. The percentage of free ions is found to influence the transport parameters of number density (n), ionic mobility (µ), and diffusion coefficient (D). All electrolytes in this work obey the non-Debye behavior. The highest conductivity electrolyte exhibits the dominancy of ions, where the ionic transference number, tion value of (0.976) is near to infinity with a voltage of breakdown of 2.11 V. The fabricated electrochemical double-layer capacitor (EDLC) achieves the highest specific capacitance, Cs of 98.08 F/g at 10 mV/s by using the cyclic voltammetry (CV) technique.
In this study, solid polymer blend electrolytes (SPBEs) based on chitosan (CS) and methylcellulose (MC) incorporated with different concentrations of ammonium fluoride (NH4F) salt were synthesized using a solution cast technique. Both Fourier transformation infrared spectroscopy (FTIR) and X-ray diffraction (XRD) results confirmed a strong interaction and dispersion of the amorphous region within the CS:MC system in the presence of NH4F. To gain better insights into the electrical properties of the samples, the results of electrochemical impedance spectroscopy (EIS) were analyzed by electrical equivalent circuit (EEC) modeling. The highest conductivity of 2.96 × 10-3 S cm-1 was recorded for the sample incorporated with 40 wt.% of NH4F. Through transference number measurement (TNM) analysis, the fraction of ions was specified. The electrochemical stability of the electrolyte sample was found to be up to 2.3 V via the linear sweep voltammetry (LSV) study. The value of specific capacitance was determined to be around 58.3 F/g. The stability test showed that the electrical double layer capacitor (EDLC) system can be recharged and discharged for up to 100 cycles with an average specific capacitance of 64.1 F/g. The synthesized EDLC cell was found to exhibit high efficiency (90%). In the 1st cycle, the values of internal resistance, energy density and power density of the EDLC cell were determined to be 65 Ω, 9.3 Wh/kg and 1282 W/kg, respectively.
In the present work, a novel polymer composite electrolytes (PCEs) based on poly(vinyl alcohol) (PVA): ammonium thiocyanate (NH4SCN): Cd(II)-complex plasticized with glycerol (Gly) are prepared by solution cast technique. The film structure was examined by XRD and FTIR routes. The utmost ambient temperature DC ionic conductivity (σDC) of 2.01 × 10-3 S cm-1 is achieved. The film morphology was studied by field emission scanning electron microscopy (FESEM). The trend of σDC is further confirmed with investigation of dielectric properties. Transference numbers of ions (tion) and electrons (tel) are specified to be 0.96 and 0.04, respectively. Linear sweep voltammetry (LSV) displayed that the PCE potential window is 2.1 V. The desired mixture of activated carbon (AC) and carbon black was used to fabricate the electrodes of the EDLC. Cyclic voltammetry (CV) was carried out by sandwiching the PCEs between two carbon-based electrodes, and it revealed an almost rectangular shape. The EDLC exhibited specific capacitance, energy density, and equivalent series resistance with average of 160.07F/g, 18.01Wh/kg, and 51.05Ω, respectively, within 450 cycles. The EDLC demonstrated the initial power density as 4.065 × 103 W/Kg.
Understanding the reaction mechanism that controls the one-electron electrochemical reduction of oxygen is essential for sustainable use of the superoxide ion (O2˙-) during CO2 conversion. Here, stable generation of O2˙- in butyltrimethylammonium bis(trifluoromethylsulfonyl)imide [BMAmm+][TFSI-] ionic liquid (IL) was first detected at -0.823 V vs. Ag/AgCl using cyclic voltammetry (CV). The charge transfer coefficient associated with the process was ∼0.503. It was determined that [BMAmm+][TFSI-] is a task-specific IL with a large negative isovalue surface density accrued from the [BMAmm+] cation with negatively charged C(sp2) and C(sp3). Consequently, [BMAmm+][TFSI-] is less susceptible to the nucleophilic effect of O2˙- because only 8.4% O2˙- decay was recorded from 3 h long-term stability analysis. The CV analysis also detected that O2˙- mediated CO2 conversion in [BMAmm+][TFSI-] at -0.806 V vs. Ag/AgCl as seen by the disappearance of the oxidative faradaic current of O2˙-. Electrochemical impedance spectroscopy (EIS) detected the mechanism of O2˙- generation and CO2 conversion in [BMAmm+][TFSI-] for the first time. The EIS parameters in O2 saturated [BMAmm+][TFSI-] were different from those detected in O2/CO2 saturated [BMAmm+][TFSI-] or CO2 saturated [BMAmm+][TFSI-]. This was rationalized to be due to the formation of a [BMAmm+][TFSI-] film on the GC electrode, creating a 2.031 × 10-9 μF cm-2 double-layer capacitance (CDL). Therefore, during the O2˙- generation and CO2 utilization in [BMAmm+][TFSI-], the CDL increased to 5.897 μF cm-2 and 7.763 μF cm-2, respectively. The CO2 in [BMAmm+][TFSI-] was found to be highly unlikely to be electrochemically converted due to the high charge transfer resistance of 6.86 × 1018 kΩ. Subsequently, O2˙- directly mediated the CO2 conversion through a nucleophilic addition reaction pathway. These results offer new and sustainable opportunities for utilizing CO2 by reactive oxygen species in ionic liquid media.