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  1. Fulltext Microheater: material, design, fabrication, temperature control, and applications-a role in COVID-19
    Jeroish ZE, Bhuvaneshwari KS, Samsuri F, Narayanamurthy V
    Biomed Microdevices, 2021 Dec 03;24(1):3.
    PMID: 34860299 DOI: 10.1007/s10544-021-00595-8
    Heating plays a vital role in science, engineering, mining, and space, where heating can be achieved via electrical, induction, infrared, or microwave radiation. For fast switching and continuous applications, hotplate or Peltier elements can be employed. However, due to bulkiness, they are ineffective for portable applications or operation at remote locations. Miniaturization of heaters reduces power consumption and bulkiness, enhances the thermal response, and integrates with several sensors or microfluidic chips. The microheater has a thickness of ~ 100 nm to ~ 100 μm and offers a temperature range up to 1900℃ with precise control. In recent years, due to the escalating demand for flexible electronics, thin-film microheaters have emerged as an imperative research area. This review provides an overview of recent advancements in microheater as well as analyses different microheater designs, materials, fabrication, and temperature control. In addition, the applications of microheaters in gas sensing, biological, and electrical and mechanical sectors are emphasized. Moreover, the maximum temperature, voltage, power consumption, response time, and heating rate of each microheater are tabulated. Finally, we addressed the specific key considerations for designing and fabricating a microheater as well as the importance of microheater integration in COVID-19 diagnostic kits. This review thereby provides general guidelines to researchers to integrate microheater in micro-electromechanical systems (MEMS), which may pave the way for developing rapid and large-scale SARS-CoV-2 diagnostic kits in resource-constrained clinical or home-based environments.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems*
  2. Fulltext A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application
    Upadhyaya AM, Hasan MK, Abdel-Khalek S, Hassan R, Srivastava MC, Sharan P, et al.
    Front Public Health, 2021;9:759032.
    PMID: 34926383 DOI: 10.3389/fpubh.2021.759032
    This study presented an overview of current developments in optical micro-electromechanical systems in biomedical applications. Optical micro-electromechanical system (MEMS) is a particular class of MEMS technology. It combines micro-optics, mechanical elements, and electronics, called the micro-opto electromechanical system (MOEMS). Optical MEMS comprises sensing and influencing optical signals on micron-level by incorporating mechanical, electrical, and optical systems. Optical MEMS devices are widely used in inertial navigation, accelerometers, gyroscope application, and many industrial and biomedical applications. Due to its miniaturised size, insensitivity to electromagnetic interference, affordability, and lightweight characteristic, it can be easily integrated into the human body with a suitable design. This study presented a comprehensive review of 140 research articles published on photonic MEMS in biomedical applications that used the qualitative method to find the recent advancement, challenges, and issues. The paper also identified the critical success factors applied to design the optimum photonic MEMS devices in biomedical applications. With the systematic literature review approach, the results showed that the key design factors could significantly impact design, application, and future scope of work. The literature of this paper suggested that due to the flexibility, accuracy, design factors efficiency of the Fibre Bragg Grating (FBG) sensors, the demand has been increasing for various photonic devices. Except for FBG sensing devices, other sensing systems such as optical ring resonator, Mach-Zehnder interferometer (MZI), and photonic crystals are used, which still show experimental stages in the application of biosensing. Due to the requirement of sophisticated fabrication facilities and integrated systems, it is a tough choice to consider the other photonic system. Miniaturisation of complete FBG device for biomedical applications is the future scope of work. Even though there is a lot of experimental work considered with an FBG sensing system, commercialisation of the final FBG device for a specific application has not been seen noticeable progress in the past.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems*
  3. Fulltext Development of a Linear Acoustic Array for Aero-Acoustic Quantification of Camber-Bladed Vertical Axis Wind Turbine
    Butt AH, Akbar B, Aslam J, Akram N, Soudagar MEM, García Márquez FP, et al.
    Sensors (Basel), 2020 Oct 21;20(20).
    PMID: 33096774 DOI: 10.3390/s20205954
    Vertical axis wind turbines (VAWT) are a source of renewable energy and are used for both industrial and domestic purposes. The study of noise characteristics of a VAWT is an important performance parameter for the turbine. This study focuses on the development of a linear microphone array and measuring acoustic signals on a cambered five-bladed 45 W VAWT in an anechoic chamber at different tip speed ratios. The sound pressure level spectrum of VAWT shows that tonal noises such as blade passing frequencies dominate at lower frequencies whereas broadband noise corresponds to all audible ranges of frequencies. This study shows that the major portion of noise from the source is dominated by aerodynamic noises generated due to vortex generation and trailing edge serrations. The research also predicts that dynamic stall is evident in the lower Tip speed ratio (TSR) region making smaller TSR values unsuitable for a quiet VAWT. This paper compares the results of linear aeroacoustic array with a 128-MEMS acoustic camera with higher resolution. The study depicts a 3 dB margin between two systems at lower TSR values. The research approves the usage of the 8 mic linear array for small radius rotary machinery considering the results comparison with a NORSONIC camera and its resolution. These observations serve as a basis for noise reduction and blade optimization techniques.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  4. Fulltext Modeling of a high force density fishbone shaped electrostatic comb drive microactuator
    Megat Hasnan MM, Mohd Sabri MF, Mohd Said S, Nik Ghazali NN
    ScientificWorldJournal, 2014;2014:912683.
    PMID: 25165751 DOI: 10.1155/2014/912683
    This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbone shaped electrostatic comb drive actuator and compared against the performance of a straight sided electrostatic comb drive actuator. Performances of both designs are evaluated by comparison of displacement and electrostatic force. For both cases, the active area and the minimum gap distance between the two electrodes were constant. An active area of 800 × 300 μm, which contained 16 fingers of fishbone shaped actuators and 40 fingers of straight sided actuators, respectively, was used. Through simulation, improvement of drive force of the fishbone shaped electrostatic comb driver is approximately 485% higher than conventional electrostatic comb driver. These results indicate that the fishbone actuator design provides good potential for applications as high force density electrostatic microactuator in MEMS systems.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems/instrumentation*
  5. Fulltext Investigations on physical characteristics of three-dimensional coil structure for MEMS magnetometer
    N. Sulaiman, B. Y. Majlis
    ASM Science Journal, 2013;7(1):27-36.
    MyJurnal
    Measurement of low magnetic field has played an important role in many electronics applications such as navigation, military, non-destructive test, traffic detection as well as medical diagnosis and treatment. The presence of magnetic field, particularly its strength and direction, can be measured using magnetometer. There are many types of magnetometers being investigated through the years and one of the prominent types is fluxgate magnetometer. The main components of fluxgate magnetometer consisting of driving coils, sensing coils and magnetic core are developed by MEMS silicon processing technology. In this paper, an investigation on physical characteristics of the three-dimensional coil structure for a micro-scaled fluxgate magnetometer is presented. The physical characteristics such as width of the coil, distance between successive coils, and gap between the top and bottom coils which would influence the magnetic energy in magnetometer is discussed. In this work, finite-element method simulations to investigate the physical characteristics of the sensing coils were carried out, where the parameter of interest is the coils’ inductance as well as the magnetic flux density. Based on the simulation results, the varying of physical characteristics of the coils had its effects particularly in coil inductance, magnetic flux density, and magnetic energy. It could also be seen that the simulated results agreed with the theoretical aspects of magnetism in a coil. From the investigations, suitable coil dimensions were proposed.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  6. MEMS switch contact bouncing mitigation using novel dual-pulse actuation voltage
    Lai C, Wong W
    Sains Malaysiana, 2011;40.
    A novel dual-pulse actuation voltage that reduces dielectric charging in micro-electromechanical system (MEMS) switch and thus leading to a longer switch lifetime, are shown to simultaneously mitigate MEMS switch contact bouncing. A simple mass-spring-damper mathematical model is used to simulate movement of the switch contact as the excitation voltage is applied. The model shows that the novel dual-pulse voltages damped the acceleration of the switch membrane as it approaches the contact point, eventually slowing it down and minimizes the impact force. This has the effect of minimizing the occurrence of contact bouncing. Practical experiment on the commercial TeraVicta TT712-68CSP MEMS switch corroborates that the novel excitation voltages reduced bouncing.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  7. Spin-on-Glass (SOG) based insulator of stack coupled microcoils for MEMS sensors and actuators application
    Jumril Yunas, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Badariah Bais
    Sains Malaysiana, 2014;43:289-293.
    A comprehensive study on the spin-on-glass (SOG) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425oC in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5% can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  8. Fulltext Investigation of Micromachined Antenna Substrates Operating at 5 GHz for RF Energy Harvesting Applications
    Mohd Yunus NH, Yunas J, Pawi A, Rhazali ZA, Sampe J
    Micromachines (Basel), 2019 Feb 22;10(2).
    PMID: 30813276 DOI: 10.3390/mi10020146
    This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna designs that can be integrated with the rectifier circuit and fabricated in a CMOS (Complementary Metal-Oxide Semiconductor)-compatible process approach. Therefore, the investigation involves the comparison of three different micromachined antenna substrate materials, including micromachined Si surface, micromachined Si bulk with air gaps, and micromachined glass-surface antenna, as well as conventional RT/Duroid-5880 (Rogers Corp., Chandler, AZ, USA)-based antenna as the reference. The characteristics of the antennas have been analysed using CST-MWS (CST MICROWAVE STUDIO®-High Frequency EM Simulation Tool). The results show that the Si-surface micromachined antenna does not meet the parameter requirement for RF antenna specification. However, by creating an air gap on the Si substrate using a micro-electromechanical system (MEMS) process, the antenna performance could be improved. On the other hand, the glass-based antenna presents a good S11 parameter, wide bandwidth, VSWR (Voltage Standing Wave Ratio) ≤ 2, omnidirectional radiation pattern and acceptable maximum gain of >5 dB. The measurement results on the fabricated glass-based antenna show good agreement with the simulation results. The study on the alternative antenna substrates and structures is especially useful for the development of integrated patch antennas for RF energy harvesting systems.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  9. Fulltext A novel vehicle stationary detection utilizing map matching and IMU sensors
    Amin MS, Reaz MB, Nasir SS, Bhuiyan MA, Ali MA
    ScientificWorldJournal, 2014;2014:597180.
    PMID: 25276855 DOI: 10.1155/2014/597180
    Precise navigation is a vital need for many modern vehicular applications. The global positioning system (GPS) cannot provide continuous navigation information in urban areas. The widely used inertial navigation system (INS) can provide full vehicle state at high rates. However, the accuracy diverges quickly in low cost microelectromechanical systems (MEMS) based INS due to bias, drift, noise, and other errors. These errors can be corrected in a stationary state. But detecting stationary state is a challenging task. A novel stationary state detection technique from the variation of acceleration, heading, and pitch and roll of an attitude heading reference system (AHRS) built from the inertial measurement unit (IMU) sensors is proposed. Besides, the map matching (MM) algorithm detects the intersections where the vehicle is likely to stop. Combining these two results, the stationary state is detected with a smaller timing window of 3 s. A longer timing window of 5 s is used when the stationary state is detected only from the AHRS. The experimental results show that the stationary state is correctly identified and the position error is reduced to 90% and outperforms previously reported work. The proposed algorithm would help to reduce INS errors and enhance the performance of the navigation system.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems/methods; Micro-Electrical-Mechanical Systems/standards*
  10. Fulltext Fabrication and Characterization of a CMOS-MEMS Humidity Sensor
    Dennis JO, Ahmed AY, Khir MH
    Sensors (Basel), 2015;15(7):16674-87.
    PMID: 26184204 DOI: 10.3390/s150716674
    This paper reports on the fabrication and characterization of a Complementary Metal Oxide Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded microheater operated at relatively elevated temperatures (40 °C to 80 °C) for the purpose of relative humidity measurement. The sensing principle is based on the change in amplitude of the device due to adsorption or desorption of humidity on the active material layer of titanium dioxide (TiO2) nanoparticles deposited on the moving plate, which results in changes in the mass of the device. The sensor has been designed and fabricated through a standard 0.35 µm CMOS process technology and post-CMOS micromachining technique has been successfully implemented to release the MEMS structures. The sensor is operated in the dynamic mode using electrothermal actuation and the output signal measured using a piezoresistive (PZR) sensor connected in a Wheatstone bridge circuit. The output voltage of the humidity sensor increases from 0.585 mV to 30.580 mV as the humidity increases from 35% RH to 95% RH. The output voltage is found to be linear from 0.585 mV to 3.250 mV as the humidity increased from 35% RH to 60% RH, with sensitivity of 0.107 mV/% RH; and again linear from 3.250 mV to 30.580 mV as the humidity level increases from 60% RH to 95% RH, with higher sensitivity of 0.781 mV/% RH. On the other hand, the sensitivity of the humidity sensor increases linearly from 0.102 mV/% RH to 0.501 mV/% RH with increase in the temperature from 40 °C to 80 °C and a maximum hysteresis of 0.87% RH is found at a relative humidity of 80%. The sensitivity is also frequency dependent, increasing from 0.500 mV/% RH at 2 Hz to reach a maximum value of 1.634 mV/% RH at a frequency of 12 Hz, then decreasing to 1.110 mV/% RH at a frequency of 20 Hz. Finally, the CMOS-MEMS humidity sensor showed comparable response, recovery, and repeatability of measurements in three cycles as compared to a standard sensor that directly measures humidity in % RH.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  11. Fulltext A Theoretical Study of Surface Mode Propagation with a Guiding Layer of GaN/Sapphire Hetero-Structure in Liquid Medium
    Mohd Razip Wee MF, Jaafar MM, Faiz MS, Dee CF, Yeop Majlis B
    Biosensors (Basel), 2018 Dec 05;8(4).
    PMID: 30563159 DOI: 10.3390/bios8040124
    Gallium Nitride (GaN) is considered as the second most popular semiconductor material in industry after silicon. This is due to its wide applications encompassing Light Emitting Diode (LED) and power electronics. In addition, its piezoelectric properties are fascinating to be explored as electromechanical material for the development of diverse microelectromechanical systems (MEMS) application. In this article, we conducted a theoretical study concerning surface mode propagation, especially Rayleigh and Sezawa mode in the layered GaN/sapphire structure with the presence of various guiding layers. It is demonstrated that the increase in thickness of guiding layer will decrease the phase velocities of surface mode depending on the material properties of the layer. In addition, the Q-factor value indicating the resonance properties of surface mode appeared to be affected with the presence of fluid domain, particularly in the Rayleigh mode. Meanwhile, the peak for Sezawa mode shows the highest Q factor and is not altered by the presence of fluid. Based on these theoretical results using the finite element method, it could contribute to the development of a GaN-based device to generate surface acoustic wave, especially in Sezawa mode which could be useful in acoustophoresis, lab on-chip and microfluidics applications.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  12. Fulltext A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
    Algamili AS, Khir MHM, Dennis JO, Ahmed AY, Alabsi SS, Ba Hashwan SS, et al.
    Nanoscale Res Lett, 2021 Jan 26;16(1):16.
    PMID: 33496852 DOI: 10.1186/s11671-021-03481-7
    Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  13. Fulltext Fast fabrication of polyimide membrane on silicon wafer
    Sugandi, G., Majlis, B.Y.
    ASM Science Journal, 2012;6(2):122-127.
    MyJurnal
    Since its invention, polyimide (PI) has been widely used in micro-electro-mechanical system (MEMS) devices. For fabrication, the PI membrane, PI-2723 HD-Microsystems was used as the membrane material due to its Young's modulus of 2.7 GPa and its film thickness could easily be controlled by changing the speed of the spin coater system. The application PI as membrane structure on silicon wafers therefore gave a much better mechanical performance then conventional membranes made of silicon dioxide (SiO2) or silicon nitride (Si3N4) layers. The fabrication of PI membrane was the same as for SiO2 and Si3N4 membranes; the basic step was to etch a side of the silicon wafer using wet anisotropic etching. This paper proposes an effective process for fabrication of PI membrane with f ast and little supervision. In this process, a dual step process was wet anisotropic etching of single crystal silicon using pottasium hydroxyl (KOH) with different concentrations and temperature processes. For the first process, 45% KOH under boiling temperature was used to etch at least 90%–95% of the silicon. In the second process, the silicon was submerged in 45% KOH with temperature at 70ºC–80ºC to etch away the residual silicon until a clean and transparent PI membrane was achieved. Using this method, the fabrication of PI membrane could be generated fast.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  14. Sputtered Encapsulation as Wafer Level Packaging for Isolatable MEMS Devices: A Technique Demonstrated on a Capacitive Accelerometer
    Hamzah AA, Yunas J, Majlis BY, Ahmad I
    Sensors (Basel), 2008 Nov 19;8(11):7438-7452.
    PMID: 27873938
    This paper discusses sputtered silicon encapsulation as a wafer level packaging approach for isolatable MEMS devices. Devices such as accelerometers, RF switches, inductors, and filters that do not require interaction with the surroundings to function, could thus be fully encapsulated at the wafer level after fabrication. A MEMSTech 50g capacitive accelerometer was used to demonstrate a sputtered encapsulation technique. Encapsulation with a very uniform surface profile was achieved using spin-on glass (SOG) as a sacrificial layer, SU-8 as base layer, RF sputtered silicon as main structural layer, eutectic gold-silicon as seal layer, and liquid crystal polymer (LCP) as outer encapsulant layer. SEM inspection and capacitance test indicated that the movable elements were released after encapsulation. Nanoindentation test confirmed that the encapsulated device is sufficiently robust to withstand a transfer molding process. Thus, an encapsulation technique that is robust, CMOS compatible, and economical has been successfully developed for packaging isolatable MEMS devices at the wafer level.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  15. Fulltext A Systematic Approach to the Design and Characterization of A Smart Insole for Detecting Vertical Ground Reaction Force (vGRF) in Gait Analysis
    Tahir AM, Chowdhury MEH, Khandakar A, Al-Hamouz S, Abdalla M, Awadallah S, et al.
    Sensors (Basel), 2020 Feb 11;20(4).
    PMID: 32053914 DOI: 10.3390/s20040957
    Gait analysis is a systematic study of human locomotion, which can be utilized in variousapplications, such as rehabilitation, clinical diagnostics and sports activities. The various limitationssuch as cost, non-portability, long setup time, post-processing time etc., of the current gait analysistechniques have made them unfeasible for individual use. This led to an increase in research interestin developing smart insoles where wearable sensors can be employed to detect vertical groundreaction forces (vGRF) and other gait variables. Smart insoles are flexible, portable and comfortablefor gait analysis, and can monitor plantar pressure frequently through embedded sensors thatconvert the applied pressure to an electrical signal that can be displayed and analyzed further.Several research teams are still working to improve the insoles' features such as size, sensitivity ofinsoles sensors, durability, and the intelligence of insoles to monitor and control subjects' gait bydetecting various complications providing recommendation to enhance walking performance. Eventhough systematic sensor calibration approaches have been followed by different teams to calibrateinsoles' sensor, expensive calibration devices were used for calibration such as universal testingmachines or infrared motion capture cameras equipped in motion analysis labs. This paper providesa systematic design and characterization procedure for three different pressure sensors: forcesensitiveresistors (FSRs), ceramic piezoelectric sensors, and flexible piezoelectric sensors that canbe used for detecting vGRF using a smart insole. A simple calibration method based on a load cellis presented as an alternative to the expensive calibration techniques. In addition, to evaluate theperformance of the different sensors as a component for the smart insole, the acquired vGRF fromdifferent insoles were used to compare them. The results showed that the FSR is the most effectivesensor among the three sensors for smart insole applications, whereas the piezoelectric sensors canbe utilized in detecting the start and end of the gait cycle. This study will be useful for any researchgroup in replicating the design of a customized smart insole for gait analysis.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems
  16. Fulltext Compact double-p slotted inset-fed microstrip patch antenna on high dielectric substrate
    Ahsan MR, Islam MT, Habib Ullah M, Mahadi WN, Latef TA
    ScientificWorldJournal, 2014;2014:909854.
    PMID: 25165750 DOI: 10.1155/2014/909854
    This paper presents a compact sized inset-fed rectangular microstrip patch antenna embedded with double-P slots. The proposed antenna has been designed and fabricated on ceramic-PTFE composite material substrate of high dielectric constant value. The measurement results from the fabricated prototype of the antenna show -10 dB reflection coefficient bandwidths of 200 MHz and 300 MHz with center resonant frequency of 1.5 GHz and 4 GHz, respectively. The fabricated antenna has attained gains of 3.52 dBi with 81% radiation efficiency and 5.72 dBi with 87% radiation efficiency for lower band and upper band, respectively. The measured E- and H-plane radiation patterns are also presented for better understanding. Good agreement between the simulation and measurement results and consistent radiation patterns make the proposed antenna suitable for GPS and C-band applications.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems/instrumentation*
  17. Fulltext Analysis of glass-reinforced epoxy material for radio frequency resonator
    Zaman MR, Islam MT, Misran N, Yatim B
    ScientificWorldJournal, 2014;2014:831435.
    PMID: 24977230 DOI: 10.1155/2014/831435
    A radio frequency (RF) resonator using glass-reinforced epoxy material for C and X band is proposed in this paper. Microstrip line technology for RF over glass-reinforced epoxy material is analyzed. Coupling mechanism over RF material and parasitic coupling performance is explained utilizing even and odd mode impedance with relevant equivalent circuit. Babinet's principle is deployed to explicate the circular slot ground plane of the proposed resonator. The resonator is designed over four materials from different backgrounds which are glass-reinforced epoxy, polyester, gallium arsenide (GaAs), and rogers RO 4350B. Parametric studies and optimization algorithm are applied over the geometry of the microstrip resonator to achieve dual band response for C and X band. Resonator behaviors for different materials are concluded and compared for the same structure. The final design is fabricated over glass-reinforced epoxy material. The fabricated resonator shows a maximum directivity of 5.65 dBi and 6.62 dBi at 5.84 GHz and 8.16 GHz, respectively. The lowest resonance response is less than -20 dB for C band and -34 dB for X band. The resonator is prototyped using LPKF (S63) drilling machine to study the material behavior.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems/instrumentation*
  18. Fulltext Optical Characterization of Lorentz Force Based CMOS-MEMS Magnetic Field Sensor
    Dennis JO, Ahmad F, Khir MH, Bin Hamid NH
    Sensors (Basel), 2015;15(8):18256-69.
    PMID: 26225972 DOI: 10.3390/s150818256
    Magnetic field sensors are becoming an essential part of everyday life due to the improvements in their sensitivities and resolutions, while at the same time they have become compact, smaller in size and economical. In the work presented herein a Lorentz force based CMOS-MEMS magnetic field sensor is designed, fabricated and optically characterized. The sensor is fabricated by using CMOS thin layers and dry post micromachining is used to release the device structure and finally the sensor chip is packaged in DIP. The sensor consists of a shuttle which is designed to resonate in the lateral direction (first mode of resonance). In the presence of an external magnetic field, the Lorentz force actuates the shuttle in the lateral direction and the amplitude of resonance is measured using an optical method. The differential change in the amplitude of the resonating shuttle shows the strength of the external magnetic field. The resonance frequency of the shuttle is determined to be 8164 Hz experimentally and from the resonance curve, the quality factor and damping ratio are obtained. In an open environment, the quality factor and damping ratio are found to be 51.34 and 0.00973 respectively. The sensitivity of the sensor is determined in static mode to be 0.034 µm/mT when a current of 10 mA passes through the shuttle, while it is found to be higher at resonance with a value of 1.35 µm/mT at 8 mA current. Finally, the resolution of the sensor is found to be 370.37 µT.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems/instrumentation*
  19. MEMS biosensor for monitoring water toxicity based on quartz crystal microbalance
    Lee KL, Ng S, Li F, Nordin AN, Voiculescu I
    Biointerphases, 2020 03 26;15(2):021006.
    PMID: 32216379 DOI: 10.1116/1.5142722
    This paper presents the use of a commercial quartz crystal microbalance (QCM) to investigate live-cell activity in water-based toxic solutions. The QCM used in this research has a resonant frequency of 10 MHz and consists of an AT-cut quartz crystal with gold electrodes on both sides. This QCM was transformed into a functional biosensor by integrating with polydimethylsiloxane culturing chambers. Rainbow trout gill epithelial cells were cultured on the resonators as a sensorial layer. The fluctuation of the resonant frequency, due to the change of cell morphology and adhesion, is an indicator of water toxicity. The shift in the resonant frequency provides information about the viability of the cells after exposure to toxicants. The toxicity result shows distinct responses after exposing cells to 0.526 μM of pentachlorophenol (PCP) solution, which is the Military Exposure Guidelines concentration. This research demonstrated that the QCM is sensitive to a low concentration of PCP and no further modification of the QCM surface was required.
    Matched MeSH terms: Micro-Electrical-Mechanical Systems*
  20. Fulltext A comparison of medication adherence between subsidized and self-paying patients in Malaysia
    Aziz H, Hatah E, Makmor-Bakry M, Islahudin F, Ahmad Hamdi N, Mok Pok Wan I
    Malays Fam Physician, 2018;13(2):2-9.
    PMID: 30302177 MyJurnal
    Background: Limited efforts have been made to evaluate medication adherence among subsidized and self-paying patients.

    Objective: To investigate medication adherence among patients with and without medication subsidies and to identify factors that may influence patients' adherence to medication. Setting: Government healthcare institutions in Kuala Lumpur, Selangor, and Negeri Sembilan and private healthcare institutions in Selangor and Negeri Sembilan, Malaysia.

    Methods: This cross-sectional study sampled patients with and without medication subsidies (self-paying patients). Only one of the patient's medications was re-packed into Medication Event Monitoring Systems (MEMS) bottles, which were returned after four weeks. Adherence was defined as the dose regimen being executed as prescribed on 80% or more of the days. The factors that may influence patients' adherence were modelled using binary logistic regression. Main outcome measure: Percentage of medication adherence.

    Results: A total of 97 patients, 50 subsidized and 47 self-paying, were included in the study. Medication adherence was observed in 50% of the subsidized patients and 63.8% of the self-paying patients (χ2=1.887, df=1, p=0.219). None of the evaluated variables had a significant influence on patients' medication adherence, with the exception of attending drug counselling. Patients who attended drug counselling were found to be 3.3 times more likely to adhere to medication than those who did not (adjusted odds ratio of 3.29, 95% CI was 1.42 to 7.62, p = 0.006).

    Conclusion: There is no significant difference in terms of medication adherence between subsidized and self-paying patients. Future studies may wish to consider evaluating modifiable risk factors in the examination of non-adherence among subsidized and self-paying patients in Malaysia.

    Matched MeSH terms: Micro-Electrical-Mechanical Systems
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